Webbline x loc = 0.0 spacing=0.1. line x loc = 0.1 spacing=0.1. #the vertical definition. line y loc = 0 spacing = 0.02. line y loc = 2.0 spacing = 0.20. #initialize the mesh. init silicon … Webb21 jan. 2024 · 半导体实验及分析结果.doc,go athena #TITLE:Simple Boron Anneal #the x dimension definition line x loc=0.0 spacing=0.1 line x loc=0.1 spacing=0.1 #the vertical …
Silvaco二极管、三极管、CMOS的制备 - CSDN博客
Webb硅衬底,含磷浓度 1×10^14cm^(-3)。 # initialize the mesh init silicon c.phos=1.0e14 # 工艺步骤,硼离子注入和退火两步工艺。一个命令占一行。 # perform uniform boron … Webb19 nov. 2013 · 半导体工艺 仿真 结果 半导体 工艺. diffusego athena line loc=0.00spac=0.10 line loc=10.00spac=0.10 line loc=0.00spac=0.03 line loc=0.30spac=0.02 line … file types of vector graphics
Silvaco TCAD——二维工艺仿真 - CodeAntenna
WebbThe n-type silicon is made by including atoms that have one more electron in their outer level than does silicon, such as phosphorus. Phosphorus ... spac=1 line x loc=10 … WebbExample 3.4 Problem: Use Silvaco’s Athena software to create a quasi one dimensional grid and do a subsequent solid source phosphorus predeposition diffusion Webb15 maj 2024 · 24.1:2. go athena dimensiondefinition line 0.0spacing=0.1 line 0.1spacing=0.1 verticaldefinition line 0.02line 2.0spacing 0.20line 25.0spacing … file types open with program