WebIntegrated SMIF wafer sorters remove defect prone vacuum-wand wafer-handling operations; All automated materials handling system (AMHS) elements use SMIF-Pods; All lot tracking is controlled via pod or wafer-cassette mounted RF or IR Smart-Tags or Auto ID. Websmif Robots and Design’s SMIF is an ergonomically designed SMIF-I/O that has pod cassette loading and unloading into a wide variety of 150~200mm wafer processing and metrology …
Cost-effective fab-capacity expansion Semiconductor Digest
WebThe SMIF enclosure in Figure 1 includes an environment that contains a localenclosure,asupplysystemofcleanairinsidetheenclosure, a standard mechanical interface (SMIF) for control and trans- Received 16 April 2005; accepted 26 July 2005. WebThe Standard Mechanical Interface (SMIF) is appropriate for 200 mm wafers in semiconductors and functions similarly to the FOUP. Both SMIF and FOUP applications … sizing an exhaust fan
Semiconductor SMIF Robots and Design
Web利用SMIF,封闭的晶圆加工系统代替了传统的运输盒,并用干净空气或氮气来在系统中加压以保持清洁。这种方法就是“晶圆隔离技术(WIT)”或“ 微局部环境”的一种。 ... 图 5.13 Wafer transfer microenvironment芯片传输微环境 ... WebThe wafer is in a predictable location, enabling precise wafer access Reliable equipment operation on process tools and automated materials handling systems Secures and protects wafer against contamination and damage Specify Your Part Reset All Wafer Capacity End Wall Handle Type Color RFID Material End Wall Flange Type Pins and Holes Part Number: WebA standard interface is required for containers intended to control the transport environment of cassettes containing wafers or disks. The interface must address the proper container … sizing an hvac system